CHIPS Incentives Program – Facilities for Semiconductor Materials and Manufacturing Equipment | 2023 NIST CHIPS SMME 01

Opportunity Information: Apply for 2023 NIST CHIPS SMME 01

The CHIPS Incentives Program - Facilities for Semiconductor Materials and Manufacturing Equipment is a federal funding opportunity run by the National Institute of Standards and Technology (NIST) under the CHIPS Incentives Program. Its goal is to strengthen U.S. economic and national security by accelerating long-term, economically sustainable growth of the domestic semiconductor ecosystem. This Notice of Funding Opportunity (NOFO) is the program's second NOFO and focuses specifically on building out the upstream supply chain that supports chipmaking: semiconductor materials and the manufacturing equipment used to produce semiconductors.

The opportunity seeks applications for real-world, commercial facility projects located in the United States that involve the construction, expansion, or modernization of facilities tied to semiconductor materials and semiconductor manufacturing equipment. In practical terms, this includes projects that increase domestic capacity for producing critical inputs and tools used across the semiconductor lifecycle, with an emphasis on investments that can scale and remain financially viable over the long run rather than short-term, one-off builds. The eligible project scope is broadly aligned with facilities connected to fabrication, assembly, testing, advanced packaging, production, or research and development, as long as the facility is directly related to semiconductors themselves, the materials used to manufacture semiconductors, or the equipment used in semiconductor manufacturing.

Funding is offered through a cooperative agreement, which generally means that the government expects an active partnership role during the period of performance rather than a hands-off grant. The opportunity is categorized as discretionary funding and is listed under the Science and Technology and other Research and Development activity category. The CFDA number associated with this program is 11.037, and the opportunity number is 2023 NIST CHIPS SMME 01. The listing shows an original closing date of 2026-11-01, indicating a multi-year window during which applications may be accepted, though applicants should still rely on the official CHIPS program site for any phased deadlines, required pre-application steps, or submission gates that may apply.

Eligibility is limited to "covered entities." For this NOFO, a covered entity includes nonprofit organizations, private-sector entities, consortia of private-sector entities, or mixed consortia that include nonprofit, public, and private-sector entities. A key requirement is that the applicant must be able to demonstrate the capability to substantially finance, construct, expand, or modernize a qualifying facility. In other words, the program is aimed at applicants with the technical capacity and financial strength (or a consortium structure that collectively provides it) to execute major industrial or commercialization-focused facility investments.

All applications must be submitted through the CHIPS Incentives Portal at https://applications.chips.gov rather than through other federal grant submission systems. The government directs applicants to chips.gov for official instructions, program resources, and updates. Application process questions can be sent to apply@chips.gov, which is presented as the primary contact for submission-related assistance.

• The National Institute of Standards and Technology in the science and technology and other research and development sector is offering a public funding opportunity titled "CHIPS Incentives Program – Facilities for Semiconductor Materials and Manufacturing Equipment" and is now available to receive applicants.
• Interested and eligible applicants and submit their applications by referencing the CFDA number(s): 11.037.
• This funding opportunity was created on 2023-09-29.
• Applicants must submit their applications by 2026-11-01. (Agency may still review applications by suitable applicants for the remaining/unused allocated funding in 2026.)
• Eligible applicants include: Others.

Apply for 2023 NIST CHIPS SMME 01

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